Sharp R-880F Bedienerhandbuch

B756–01–880 Issue FInstruction ManualEXT Split Flow Compound Turbomolecular PumpsDescription Item Number24 Volt EXT Compound Turbomolecular Pumps:EXT2

EXT Split Flow Compound Turbomolecular PumpsINTRODUCTIONPAGE2Issue F 2 Mar 07This page intentionally blank.

EXT Split Flow Compound Turbomolecular PumpsTECHNICAL DATAPAGE3Mar 07 3 Issue F2 TECHNICAL DATA2.1 General2.2 Pumping mediaNote: Concentrations of gas

EXT Split Flow Compound Turbomolecular PumpsTECHNICAL DATAPAGE4Issue F 4 Mar 07You can use the pumps to pump oxygen and water vapour, subject to the f

EXT Split Flow Compound Turbomolecular PumpsTECHNICAL DATAPAGE5Mar 07 5 Issue FParameterEXT70/200H EXT200/200H and HiEXT200/200HGCMS*EXT 200/200HICPMS

EXT Split Flow Compound Turbomolecular PumpsTECHNICAL DATAPAGE6Issue F 6 Mar 07Minimum backing pump displacement0.6 m3h-10.6 m3h-10.6 m3h-10.6 m3h-1Ma

EXT Split Flow Compound Turbomolecular PumpsTECHNICAL DATAPAGE7Mar 07 7 Issue F2.5 Materials exposed to gases pumpedThe following materials and compon

EXT Split Flow Compound Turbomolecular PumpsTECHNICAL DATAPAGE8Issue F 8 Mar 07Figure 2 – Dimensions of the EXT 200/200H GCMS Split Flow Pump system (

EXT Split Flow Compound Turbomolecular PumpsTECHNICAL DATAPAGE9Mar 07 9 Issue FFigure 3 – Dimensions of the EXT 200/200H ICPMS Split Flow Pump system

EXT Split Flow Compound Turbomolecular PumpsTECHNICAL DATAPAGE10Issue F 10 Mar 07Figure 4 – Dimensions of the EXT 200/200H GCMS/LCMS (reversed body)1.

EXT Split Flow Compound Turbomolecular PumpsINSTALLATIONPAGE11Mar 07 11 Issue F3 INSTALLATION3.1 Unpack and inspectTake care when you unpack the pump

Declaration of ConformityWq BOC Edwa.ds,Manor Royal,Crawley,West Sussex RH10 2LW UKdeclare under our sole responsibiliry rhar rhe product(s)SPLIT-FLO

EXT Split Flow Compound Turbomolecular PumpsINSTALLATIONPAGE12Issue F 12 Mar 073.2 Typical installationA schematic of a typical vacuum system using a

EXT Split Flow Compound Turbomolecular PumpsINSTALLATIONPAGE13Mar 07 13 Issue F3.3 Connection to the vacuum systemCarefully remove the pump from packa

EXT Split Flow Compound Turbomolecular PumpsINSTALLATIONPAGE14Issue F 14 Mar 073.3.2 Inlet-screens (supplied fitted)Do not remove the inlet-screens un

EXT Split Flow Compound Turbomolecular PumpsINSTALLATIONPAGE15Mar 07 15 Issue FUse the BOC Edwards trapped o-ring supplied with the pump and use a min

EXT Split Flow Compound Turbomolecular PumpsINSTALLATIONPAGE16Issue F 16 Mar 07We recommend that you use a BOC Edwards RV Backing-Pump. The minimum si

EXT Split Flow Compound Turbomolecular PumpsINSTALLATIONPAGE17Mar 07 17 Issue F3.5 Electrical installationThe EXT Split Flow Pump should be electrical

EXT Split Flow Compound Turbomolecular PumpsINSTALLATIONPAGE18Issue F 18 Mar 073.6 Cooling3.6.1 IntroductionYou must use water-cooling in addition to

EXT Split Flow Compound Turbomolecular PumpsOPERATIONPAGE19Mar 07 19 Issue F4OPERATION4.1 Start-upUse the procedure below to start up a basic, manuall

EXT Split Flow Compound Turbomolecular PumpsOPERATIONPAGE20Issue F 20 Mar 074.2 Shut-downNote: In an emergency only, open the vent-valve quickly to de

EXT Split Flow Compound Turbomolecular PumpsMAINTENANCEPAGE21Mar 07 21 Issue F5MAINTENANCE5.1 IntroductionThe maintenance operations for the EXT Split

Declaration of IncorporationWe, BOC Edwards,Manor Royal,Crawley,West Sussex RH10 2LW, UKdeclare under our sole responsibility that the

EXT Split Flow Compound Turbomolecular PumpsMAINTENANCEPAGE22Issue F 22 Mar 075.4 Cleaning the pumpIf the inside of the EXT Split Flow pumps is contam

EXT Split Flow Compound Turbomolecular PumpsMAINTENANCEPAGE23Mar 07 23 Issue FSymptom Check ActionThe impeller does not rotate. Afterpressing start -

EXT Split Flow Compound Turbomolecular PumpsMAINTENANCEPAGE24Issue F 24 Mar 07Is the timer set incorrectly? Increase the timer setting (refer to the i

EXT Split Flow Compound Turbomolecular PumpsMAINTENANCEPAGE25Mar 07 25 Issue FThe EXT Split Flow Pump is very noisy or there is excessive vibration or

EXT Split Flow Compound Turbomolecular PumpsMAINTENANCEPAGE26Issue F 26 Mar 07This page intentionally blank.

EXT Split Flow Compound Turbomolecular PumpsSTORAGE AND DISPOSALPAGE27Mar 07 27 Issue F6 STORAGE AND DISPOSAL6.1 StorageUse the following procedure to

EXT Split Flow Compound Turbomolecular PumpsSTORAGE AND DISPOSALPAGE28Issue F 28 Mar 07This page intentionally blank.

EXT Split Flow Compound Turbomolecular PumpsSERVICE, SPARES AND ACCESSORIESPAGE29Mar 07 29 Issue F7 SERVICE, SPARES AND ACCESSORIES7.1 IntroductionBOC

EXT Split Flow Compound Turbomolecular PumpsSERVICE, SPARES AND ACCESSORIESPAGE30Issue F 30 Mar 077.3.3 Inlet-flange sealsEXT Split Flow Pumps are sup

EXT Split Flow Compound Turbomolecular PumpsSERVICE, SPARES AND ACCESSORIESPAGE31Mar 07 31 Issue F7.4.4 Pump-to-controller cablesYou must fit a pump-t

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EXT Split Flow Compound Turbomolecular PumpsSERVICE, SPARES AND ACCESSORIESPAGE32Issue F 32 Mar 077.4.8 VRX Vent-restrictorUse a VRX fixed orifice ven

Mar 07 Issue F33PAGE33AAccessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30ACX air-cooler . . . . . . . . . . . . . . . . . . .

Issue F Mar 0734This page intentionally blank.PAGE34

EXT Split Flow Compound Turbomolecular PumpsPAGEiMar 07 i Issue FCONTENTSSection Page1INTRODUCTION 11.1 Scope and definitions 12 TECHNICAL DATA 32.1 G

EXT Split Flow Compound Turbomolecular PumpsPAGEiiIssue F ii Mar 077 SERVICE, SPARES AND ACCESSORIES 297.1 Introduction 297.2 Service 297.3 Spares 297

EXT Split Flow Compound Turbomolecular PumpsPAGEiiiMar 07 iii Issue FTABLESTable Page1 General 32 Vent gas and vent control data 43 Water-cooling 44 T

EXT Split Flow Compound Turbomolecular PumpsPAGEivIssue F iv Mar 07This page intentionally blank.

EXT Split Flow Compound Turbomolecular PumpsINTRODUCTIONPAGE1Mar 07 1 Issue F1 INTRODUCTION1.1 Scope and definitionsThis manual provides installation,