Sharp R-880F Bedienerhandbuch PDF herunterladen (Seite 7)

EXT Split Flow Compound Turbomolecular Pumps

PAGE

iii

Mar 07 iii Issue F

TABLES

Table Page

1 General 3

2 Vent gas and vent control data 4

3 Water-cooling 4

4 Technical data 5

5 List of items supplied 13

6 Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve)16

7 Fault finding 23

8ISX Inlet-screens 29

9 Inlet-strainer (interstage pumps only) 29

10 Inlet-flange seals 30

11 EXDC Drive modules 30

12 EXC Controllers 30

13 Pump-to-controller cable 31

14 EXT Water cooling block assembly 31

15 TAV Vent-valve and vent-port adaptor 31

16 ACX Air-cooler 31

17 VRX Vent-restrictor 32

1 2 3 4 5 6 7 8 9 10 11 12 ... 41 42

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Sharp R-880F Bedienerhandbuch Seite 7