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EXT Split Flow Compound Turbomolecular Pumps

TECHNICAL DATA

PAGE

Issue F 4 Mar 07

You can use the pumps to pump oxygen and water vapour, subject to the following conditions:

• Oxygen – The oxygen concentration must be less than 20% by volume.

• Water vapour - You must ensure that vapour does not condense inside the pump; refer to

Section 3.6.3.

If you wish to pump a gas not in the list above, contact your supplier for advice. If you do not contact

your supplier, you may invalidate the warranty on the pump. The pumps are not suitable for pumping

aggressive or corrosive gases.

2.3 Vent gas specification and vent control data

Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase

the subsequent pump-down time. To reduce pump-down times you should vent the pump with dry, clean

gases.

2.4 Water-cooling

The following cooling-water specification corresponds to a typical high-quality drinking water

specification. Check with your water supply authority if you are in doubt about the quality of your supply.

Vent gas Dry air, nitrogen, argon or other inert gases

Maximum dew point at atmospheric pressure -22

Maximum size of particulate 1 µm

Maximum concentration of oil 0.1 parts per million

Time for rotational speed to reach 50% > 15 sec

Table 2 - Vent gas and vent control data

Quality Mechanically and optically clean with no deposits

or turbidity

pH value 6.0 to 8.0

Maximum calcium carbonate concentration 75 parts per million

Maximum chloride concentration 100 parts per million

Minimum oxygen concentration 4 parts per million

Minimum water-cooling flow rate (at 15

C) 15 l.hr

-1

Water temperature See Table 4

Maximum water pressure 5 bar (gauge), 73.5 psig, 6x10

Materials exposed to cooling-water Nickel plated brass

Table 3 - Water-cooling

1 2 ... 7 8 9 10 11 12 13 14 15 16 17 ... 41 42

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Sharp R-880F Bedienerhandbuch Seite 12